Cantilever deflection read-out with a grated waveguide optical cavity
نویسنده
چکیده
We propose a novel and highly sensitive mechanooptical device for gas-sensing through nano-displacements, based on micro-cantilevers, supplied with a selective gas absorbing layer (Pd), suspended above a Si3N4 grated waveguide (GWG). We present the simulation and preliminary experimental results, which indicate the sensing of nanodisplacements, an important intermediate step for the gas-sensing purpose.
منابع مشابه
Grated Waveguide Optical Cavity as a Compact Sensor for Sub-nanometre Cantilever Deflections
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